2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on. :154-157 Jan, 2015
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on. :340-343 Jan, 2015
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on. :656-659 Jan, 2014
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on. :1127-1130 Jan, 2014
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on. :1045-1048 Jan, 2013
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on. :226-229 Mar, 2012
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on. :286-289 Mar, 2012
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on. :353-356 Jan, 2012