Amato, L, Armato, B, Villanueva Torrijo, L G, Emnéus, J, Heiskanen, A, Keller, S S, Boisen, A & Schmid, S 2013, ' Pyrolysed carbon resonators : Fabrication and characterization ', 39th International Conference on Micro and Nano Engineering, London, United Kingdom, 16/09/2013-19/09/2013 .