journal of microelectromechanical systems (8)
ieee transactions on components, packaging & manufacturing technology (6)
journal of micromechanics & microengineering (6)
2021 ieee international ultrasonics symposium (ius), ultrasonics symposium (ius), 2021 ieee international (5)
journal of micromechanics and microengineering (4)
2023 ieee international ultrasonics symposium (ius), ultrasonics symposium (ius), 2023 ieee international (3)
16th international conference on optical mems and nanophotonics, optical mems and nanophotonics (omn), 2011 international conference on (2)
2012 ieee 14th electronics packaging technology conference (eptc) (2)
2012 ieee 14th electronics packaging technology conference (eptc), electronics packaging technology conference (eptc), 2012 ieee 14th (2)
2014 ieee 16th electronics packaging technology conference (eptc) (2)
2014 ieee 16th electronics packaging technology conference (eptc), electronics packaging technology conference (eptc), 2014 ieee 16th (2)
2020 ieee international ultrasonics symposium (ius), ultrasonics symposium (ius),2020 ieee international (2)
2022 ieee 24th electronics packaging technology conference (eptc), electronics packaging technology conference (eptc), 2022 ieee 24th (2)
2022 ieee international ultrasonics symposium (ius), ultrasonics symposium (ius), 2022 ieee international (2)
2022 ieee sensors, sensors, 2022 ieee (2)
ieee transactions on components packaging and manufacturing technology (2)
journal of micro-nanolithography mems and moems (2)
lab on a chip (2)
microsystems & nanoengineering (2)
2013 ieee 15th electronics packaging technology conference (eptc 2013) (1)
2013 ieee 15th electronics packaging technology conference (eptc 2013), electronics packaging technology conference (eptc 2013), 2013 ieee 15th (1)
2014 ieee international electron devices meeting (1)
2014 ieee international electron devices meeting, electron devices meeting (iedm), 2014 ieee international (1)
2017 ieee 19th electronics packaging technology conference (eptc), electronics packaging technology conference (eptc), 2017 ieee 19th (1)
2019 ieee international electron devices meeting (iedm), electron devices meeting (iedm), 2019 ieee international (1)
2020 joint conference of the ieee international frequency control symposium and international symposium on applications of ferroelectrics (ifcs-isaf), frequency control symposium and international symposium on applications of ferroelectrics (ifcs-isaf), 2020 joint conference of the ieee international (1)
2021 21st international conference on solid-state sensors, actuators and microsystems (transducers), ssolid-state sensors, actuators and microsystems (transducers), 2021 21st international conference on (1)
2021 ieee 34th international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2021 ieee 34th international conference on (1)
2023 ieee 23rd international conference on nanotechnology (nano), nanotechnology (nano), 2023 ieee 23rd international conference on (1)
2023 ieee 25th electronics packaging technology conference (eptc), electronics packaging technology conference (eptc), 2023 ieee 25th (1)
2023 ieee 36th international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2023 ieee 36th international conference on (1)
2023 ieee sensors, sensors, 2023 ieee (1)
2023 joint conference of the european frequency and time forum and ieee international frequency control symposium (eftf/ifcs), frequency and time forum and ieee international frequency control symposium (eftf/ifcs), 2023 joint conference of the european (1)
advanced materials research (1)
ieee sensors journal (1)
proceedings of spie (1)