Microelectronic engineering 127 (2014): 68–71. doi:10.1016/j.mee.2014.04.030 info:cnr-pdr/source/autori:Giorgis, V.; Zilio, P.; Massari, M.; Ruffato, G.; Zacco, G.; Romanato, F./titolo:Fabrication of multiple large arrays of split ring resonators by X-ray lithographic process for sensing purposes/doi:10.1016%2Fj.mee.2014.04.030/rivista:Microelectronic engineering/anno:2014/pagina_da:68/pagina_a:71/intervallo_pagine:68–71/volume:127