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1 . Academic Journal
Conductive n-type gallium nitride thin films prepared by sputter deposition.
- 저자
- by Loretz, Patrick; Tschirky, Thomas; Isa, Fabio; Patscheider, Jörg; Trottmann, Matthias, et al.
- 소스
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jul2022, Vol. 40 Issue 4, p1-11, 11p