SPIE 6 pp. (2017). doi:10.1117/12.2271139 Advances in X-Ray/EUV Optics and Components XII : [Proceedings]-SPIE, 2017.-ISBN 97815106122979781510612303-doi:10.1117/12.2271139 Advances in X-Ray/EUV Optics and Components XII : [Proceedings]-SPIE, 2017.-ISBN 97815106122979781510612303-doi:10.1117/12.2271139Advances in X-Ray/EUV Optics and Components XII, San Diego, United States, 2017-08-06-2017-08-10