NIST efforts in extreme-ultraviolet metrology
- Resource Type
- Article
- Authors
- Naulleau, Patrick P.; Gargini, Paolo A.; Itani, Toshiro; Ronse, Kurt G.; Tarrio, C.; Grantham, S.; Vest, R. E.; Germer, T. A.; Barnes, B. M.; Moffitt, S. L.; Simonds, B. J.; Spidell, M.
- Source
- Proceedings of SPIE; November 2023, Vol. 12750 Issue: 1 p127500F-127500F-6, 1147507p
- Subject
- Language
- ISSN
- 0277786X