Accuracy aware pixel selection in multi-wavelength μDBO metrology enables higher robustness and accuracy for DRAM
- Resource Type
- Article
- Authors
- Adan, Ofer; Robinson, John C.; Chen, Chia Hung; Tsao, Sheng-Tsung; Du, Jie; Song, Wenkang; Zhu, Hongwei; Hou, Ji-Ling; Shen, Longfei; Xia, Sunny; Mathijssen, Simon; Noot, Marc; Farhadzadeh, Farzad; Yang, Kimi; Ma, Xing; Tang, Zhi-Qiang; Wang, Jing; Liu, Yu; Xu, David; Heijmerikx, Herman; Su, Eason; Mc Namara, Elliott; Bhattacharyya, Kaustuve
- Source
- Proceedings of SPIE; February 2021, Vol. 11611 Issue: 1 p116112Z-116112Z-6, 1045015p
- Subject
- Language
- ISSN
- 0277786X