Metrology and deep learning integrated solution to drive OPC model accuracy improvement
- Resource Type
- Article
- Authors
- Kye, Jongwook; Owa, Soichi; Yuan, Wei; Lu, Yifei; Zhao, Yuhang; Chen, Shoumian; Li, Ming; Hu, Hongmei; Yao, Shuxin; Liu, Zhunhua; Li, Qiaoqiao; Tian, Yu; Zhou, Zhiquan; Gu, Lirong; Wang, Jinze; Sheng, Xichen; Yan, Guanyong; Zheng, Yazhong; Yao, Yueliang; Xiao, Yanjun; Liu, Liang; Zhao, Qian; Feng, Mu; Chen, Jun; Lang, Jun
- Source
- Proceedings of SPIE; June 2019, Vol. 10961 Issue: 1 p109610N-109610N-10, 10851401p
- Subject
- Language
- ISSN
- 0277786X