Solar cell converts sunlight into electricity with no moving parts and environmental friendly. Although silicon based solar cell is currently more efficient, the dye-sensitized solar cell is considerably cheaper to manufacture because of its low cost materials and simplicity process of fabrication. In this paper, the development of plasma formed equipment for thin film material on flexible solar cell using low-pressure high frequency Plasma Chemical Vapor Deposition method on the surface of Polyethylene naphthalate (PEN) with the mixture of Ar gas and N2 gas is presented. The results indicate that using this method can be possible for surface modification.