FLEXIBLE PENETRATING ELECTRODES FOR NEURONAL STIMULATION AND RECORDING AND METHOD OF MANUFACTURING SAME
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A flexible penetrating array for neuronal applications includes an insulating layer. A conductive layer is formed on the insulating layer. A flexible polymer substrate is formed on the conductive layer; the polymer substrate includes defined penetrating electrodes. A first metallization layer is formed on the polymer substrate. A second flexible polymer layer is formed on the first metallization layer. A second metallization layer is formed on the second flexible polymer layer. A third flexible polymer layer is formed on the second metallization layer. The third flexible polymer layer is patterned to expose the second metallization layer that is integrated with the out of plane conductive layer and first metallization layer. Also disclosed is a method of forming the array.