Defect Detectability using Thermal or Acoustic wave of Scanning Electron-induced Thermal and Acoustic Wave Microscope / 走査型電子線誘起熱音響波動顕微鏡の熱波と音波の欠陥検出能
- Resource Type
- Journal Article
- Source
- The Proceedings of Conference of Kansai Branch. 2021, :3109
- Subject
SETAM 欠陥検出能 熱波 連成波動 非破壊検査 音波 - Language
- Japanese
- ISSN
- 2424-2756