IBAD c-axis parallel ZnO piezoelectric film stack for gyroscope applications
- Resource Type
- Conference
- Authors
- Kudo, Shinya; Ekida, Kohei; Jia, Junjun; Yanagitani, Takahiko
- Source
- 2022 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2022 IEEE International. :1-4 Oct, 2022
- Subject
- Bioengineering
Fields, Waves and Electromagnetics
Signal Processing and Analysis
Radio frequency
Magnetic films
Transducers
II-VI semiconductor materials
Magnetoacoustic effects
Delay lines
Zinc oxide
MEMS gyroscope
c-axis parallel ZnO
ion beam assisted deposition
- Language
- ISSN
- 1948-5727
We proposed a novel gyroscope sensor based on the transmission-and-detection type gyroscope sensor with the acoustic delay line. The c-axis parallel ZnO films are suitable as piezoelectric layer to detect the pure shear wave. In this study, the c-axis parallel ZnO thin films by using the ion beam assisted RF magnetron sputtering. c-Axis in-plane direction of the top layer and bottom layer were successfully controlled to be vertical by using ion beam direction in order to fabricate the transmission-and-detection type gyroscope sensors. The transducer comprised of the c-axis parallel ZnO thin film shows a shear mode electromechanical coupling coefficient k15 2 of 2.0%. Importantly, the pure shear wave excitation was observed in our gyroscope sensor.