Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography
- Resource Type
- Conference
- Authors
- Zhang, Lidan; Chang, Shengyuan; Chen, Xi; Ding, Yimin; Rahman, Md Tarek; Yao; Duan; Terekhov, Pavel; Ni, Xingjie
- Source
- 2022 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2022 Conference on. :1-2 May, 2022
- Subject
- Photonics and Electrooptics
Lithography
Measurement by laser beam
Focusing
Lasers and electrooptics
Apertures
Electrooptical waveguides
- Language
We reported a wafer-scale near-infrared metalens with an aperture size of eight centimeters operating around 1.5 µm fabricated using deep UV photolithography. Our measurements show that it has diffraction-limited performance with about 80% focusing efficiency.