Feedback Control Strategy for a High Speed Differential Piezo-Driven Stage by an Exclusive use of Piezoelectric Sensors
- Resource Type
- Conference
- Authors
- Leiro, Freddy Romero; Bazaei, Ali; Regnier, Stephane; Boudaoud, Mokrane
- Source
- 2022 American Control Conference (ACC) Control Conference (ACC), 2022 American. :4389-4396 Jun, 2022
- Subject
- Aerospace
Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Transportation
Damping
Tracking loops
Piezoelectric transducers
Resonant frequency
Piezoelectric actuators
Control systems
Nanoscale devices
Nano-positioning
Differential Actuation
Differential Sensing
Piezo Stacks
Internal Model Control
- Language
- ISSN
- 2378-5861
This paper presents the first experimental implementation of a XY differential piezo-driven stage in closed loop for tracking reference signals at the kHz with nanometer resolution by an exclusive use of piezoelectric sensors. The sensors are arranged differentially and in series with piezoelectric actuators. The control scheme consists of an internal loop with an analog damping controller and an external digital loop with an Internal Model Control (IMC) tracking controller. The damping controller is designed to attenuate the lightly damped resonances of the system. The tracking controller is especially designed for tracking only single tone sinusoidal reference trajectories. This particularity allows the use of piezoelectric transducers in a narrow frequency band and thus does not require a low frequency correction or the use of additional sensors to compensate for the high pass response of the transducers. The experimental results show that the nano-positioning stage is able to track a sinusoidal trajectory of 1 kHz frequency and 1.25 µm amplitude with a maximum tracking error of 4 nm. These results have never been demonstrated previously with differential piezo-driven stages and open perspectives towards high speed Atomic Force Microscopy (AFM) at the nanoscale using differential actuation and piezoelectric sensing.