Limitations and Importance of EM Models for On-wafer High Frequency Performance Evaluation
- Resource Type
- Conference
- Authors
- Mahjabeen, Nikita; Zhang, Yali; Dave, Aditya M; Um, Joseph; Harpel, Allison; Stadler, Bethanie; Franklin, Rhonda; Henderson, Rashaunda
- Source
- 2022 IEEE/MTT-S International Microwave Symposium - IMS 2022 International Microwave Symposium - IMS 2022, 2022 IEEE/MTT-S. :475-478 Jun, 2022
- Subject
- Components, Circuits, Devices and Systems
Computing and Processing
Engineering Profession
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Semiconductor device modeling
Microwave measurement
Bridges
Three-dimensional displays
Electromagnetic waveguides
Transmission line measurements
Silicon
coplanar waveguide
electromagnetic (EM) simulation
on-wafer
probes
surface waves
- Language
- ISSN
- 2576-7216
This paper introduces a new simple electromagnetic (EM) probe model to better account for the probe parasitics incurred when measuring on-wafer coplanar waveguide (CPW) lines up to 220 GHz. This is the first time the performance of CPW transmission lines on a silicon wafer have been studied with a traditional bridge model and the new bridge-probe model. The electric field study shows that the proposed new bridge-probe model better identifies the interference of the probe structure with the metal chuck and the multilayer measurement environment.