Maskless and Direct Write Preparation Method of 3D Paper-Based Microfluidic Device Based on Atmospheric Pressure Low Temperature Plasma Jet
- Resource Type
- Conference
- Authors
- Xi, Ye; Guo, Zhejun; Wang, Longchun; Xu, Qingda; Ruan, Tao; Liu, Jingquan
- Source
- 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) Micro Electro Mechanical Systems Conference (MEMS), 2022 IEEE 35th International Conference on. :935-938 Jan, 2022
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Three-dimensional displays
Plasma jets
Conferences
Stacking
Writing
Low-temperature plasmas
Programming
Atmospheric pressure plasma jet
direct writing
all-dry
3D microfluidic device
- Language
- ISSN
- 2160-1968
This paper reports a method of fabricating the fabricating the 3D paper-based microfluidic device using atmospheric pressure low temperature plasma jet, which can achieve direct writing and maskless machining by programming the motion path of the three-axis moving platform. The depth and width of the microchannel processed by this method can be adjusted and two liquid channels and through holes can be prepared on a single layer filter paper to realize a three-dimensional paper-based device. Compared with stacking and folding, this method can ensure the alignment accuracy between functional layers of 3D microfluidic devices and reduce the difficulty and time of preparation