Mismatch of nonlinear stiffness in differential MEMS resonating sensors and its self-test and calibration technique
- Resource Type
- Conference
- Authors
- Wu, Haochen; Shen, Xilong; Ma, Hailong; Yu, Chencheng; Zhao, Jian
- Source
- 2021 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA) Integrated Circuits, Technologies and Applications (ICTA), 2021 IEEE International Conference on. :195-196 Nov, 2021
- Subject
- Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Robotics and Control Systems
Micromechanical devices
Mechanical sensors
Integrated circuit technology
Accelerometers
Conferences
Built-in self-test
Calibration
MEMS oscillator
flicker noise
silicon oscillating accelerometer (SOA)
bias-instability
- Language
This paper proposes a self-test and calibration technique for differential MEMS resonating sensors to reduce the flicker noise due to nonlinear stiffness mismatch. By properly adjusting reference voltages on two channels respectively, the amplitude-frequency gain of two oscillators become the same and the flicker noise can be cancelled out. A simulation model is established based on mechanical parameters obtained from experiment results, which reveals that the long term bias-instability of MEMS sensor is reduced by 60.3%.