For researching the influence of high-speed grinding on the surface integrity of cycloid gear, in this paper, the surface of cycloid gear was grinded by high speed grinding process, applied X-ray diffraction to measure the surface residual stress, and the surface roughness and surface hardness were studied. In the experiment, the influence of grinding process parameters (e.g. wheel speed, worktable speed and grinding depth) on material surface integrity (mainly residual stress, surface roughness and surface hardness) was studied by single factor test method. The results show that the linear velocity of grinding wheel has the greatest influence on the residual stress, followed by the speed of worktable, the absolute value of residual stress perpendicular to grinding direction is bigger than that along grinding direction. The surface roughness is improved with the increase of grinding speed and the decrease of grinding depth and table speed. After high-speed grinding, the depth of hardened layer is about 55um, and the hardness of hardened layer is 60-70HV higher than that of base metal.