A Dynamic Sampling Algorithm Based on Cosrisk Assessment Model in Semiconductor Manufacturing
- Resource Type
- Conference
- Authors
- Wang, Sen; Yan, Shijia; Li, Lei; Luo, Cong; Ai, Juan; Shen, Qiang; Wang, Desheng; Ding, Shenglan; Xia, Qing
- Source
- 2021 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2021 China. :1-4 Mar, 2021
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Power, Energy and Industry Applications
Signal Processing and Analysis
Semiconductor device modeling
Economics
Semiconductor device measurement
Measurement units
Heuristic algorithms
Current measurement
Process control
- Language
Traditional fixed sampling methods are becoming more difficult to meet the requirements of today's advanced semiconductor manufacturing. In this paper, we propose a dynamic sampling algorithm based on a cost-risk assessment model. According to the result of application, the algorithm not only effectively reduces the sample ratio and the cycle time, but also reduces the catch excursion of the required number of sampling lots and interval time. It can improve the economic efficiency of measurement per unit time and further improve the production capacity of the enterprise.