Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO2 Gas Sensing
- Resource Type
- Conference
- Authors
- Ng, Doris K. T.; Ho, Chong-Pei; Xu, Linfang; Zhang, Tantan; Siow, Li-Yan; Ng, Eldwin J.; Cai, Hong; Zhang, Qingxin; Lee, Lennon Y. T.
- Source
- 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2021 IEEE 34th International Conference on. :852-855 Jan, 2021
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Absorption
Wavelength measurement
Optical device fabrication
Detectors
Optical variables measurement
Optical detectors
Frequency measurement
ScAlN pyroelectric detector
CO2 gas sensing
infrared detector
CMOS-MEMS
- Language
- ISSN
- 2160-1968
Pyroelectric IR detector is fabricated using ScAlN with 12% doped Sc as the pyroelectric sensing material. Dielectric layers that act as absorber are added on top of the ScAlN to help in IR absorption. This ScAlN-based pyroelectric detector is characterized by illumination from a MEMS thermal emitter with a sinusoidal input waveform. D* is measured to be as high as 1.87 x 10 7 (cm√Hz)/W at a frequency of 13 Hz. The optical absorptance of this device at 4.26 μm CO 2 gas absorption wavelength is around 0.75, measured using FTIR. CO 2 gas sensing measurement detects electrical signal changes of ~50-100 μV.