An Enhanced-Differential PMUT for Ultra-Long Distance Measurement in Air
- Resource Type
- Conference
- Authors
- Cai, Guixiang; Zhou, Xuemei; Yi, Yongjie; Zhou, Hong; Li, Dongxiao; Zhang, Jiajia; Huang, He; Mu, Xiaojing
- Source
- 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2021 IEEE 34th International Conference on. :899-902 Jan, 2021
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Semiconductor device measurement
Sensitivity
Ultrasonic variables measurement
Measurement uncertainty
Resonant frequency
Distance measurement
Aluminum nitride
MEMS
Differential pMUT
Aluminum Nitride
Rangefinder
Ultra-long Distance Measurement
- Language
- ISSN
- 2160-1968
This paper describes an enhanced-differential piezoelectric micromachined ultrasonic transducer (pMUT) based on Aluminum Nitride (AlN), which realizes ultralong and high-accurate distance measuring. Seven pieces of differential pMUT units with the average sensitivity of 2.077 μm/5V are integrated into one device to transmit or receive ultrasonic signal simultaneously, improving the signal strength significantly. With the resonant frequency of 77.34 kHz, this pMUT has a 4 cm-100 cm working range base on Time-of-Flight (ToF) measurement principle in chip-to-chip experiment. The test results show that maximum measuring error is 4 mm.