Millimeter-wave silicon-based micro-machined SIW filters design for System-in-package
- Resource Type
- Conference
- Authors
- Li, Zhipeng; Zeng, Rong; Lv, Liming; Wang, Ping; Zhong, Wei
- Source
- 2019 International Conference on Microwave and Millimeter Wave Technology (ICMMT) Microwave and Millimeter Wave Technology (ICMMT), 2019 International Conference on. :1-3 May, 2019
- Subject
- Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
- Language
The substrate integrated waveguide (SIW) technology is adopted to implement high-performance and self-package millimeter-wave filters on silicon substrate in this paper. The Ka-band fourth-order chebyshev filters and a dual-mode filter are designed and optimized using classic filter synthesis method and full-wave simulator to meet the millimeter-wave system-in-package (SiP) requirement, and the designed SIW filters are fabricated on 400 um high-resistivity silicon (HR-Si) substrate using bulk micro-maching process. The measured results of these filters exhibit low insertion loss in passband and good frequency selectivity in compact size, agree well with simulation results.