False Negative And False Positive Free Nanopore Fabrication Via Adaptive Learning Of The Controlled Dielectric Breakdown
- Resource Type
- Conference
- Authors
- Roshan, Kamyar Akbari; Tang, Zifan; Guan, Weihua
- Source
- 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019 20th International Conference on. :1756-1759 Jun, 2019
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Current measurement
Electric breakdown
Fabrication
Leakage currents
Low voltage
Electric fields
Solid-state nanopore
controlled breakdown
moving Z-Score
DNA sensing
- Language
- ISSN
- 2167-0021
We investigate the current transport characteristics in the electrolyte-dielectric-electrolyte structure commonly used in the in-situ controlled breakdown (CBD) fabrication of solid-state nanopores. It is found that the stochastic breakdown process could lead to fidelity issues of false positives (an incorrect indication of a true nanopore formation) and false negatives (inability to detect initial nanopore formation). Robust and deterministic detection of initial physical breakdown to alleviate false positives and false negatives is critical for precise nanopore size control. To this end, we report a high fidelity moving ZScore method based CBD fabrication of solid-state nanopore. We demonstrate 100% success rate of realizing the initial nanopore conductance of 3±1 nS (corresponds to the size of 1.7±0.6 nm) regardless of the dielectric membrane characteristics. Our study also elucidates the Joule heating is the dominant mechanism for electric field-based nanopore enlargement. Single DNA molecule sensing using nanopores fabricated by this method was successfully demonstrated. We anticipate the moving ZScore based CBD method could enable broader access to the solid state nanopore-based single molecule analysis.