Ultrasmall Line Scan Nonlinear Optical Microscope Using 1d Dichroic Mems Scanner and Siob Assembly
- Resource Type
- Conference
- Authors
- Cheng, Jin; Liu, Weiguo; Zhou, Shun; Xu, Naitao; Yildirim, Murat; Xu, Yingshun
- Source
- 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019 20th International Conference on. :1564-1567 Jun, 2019
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Microscopy
Micromechanical devices
Lenses
Optical microscopy
Optical fibers
Animals
MEMS scanner
nonlinear microscope
line scan
head-mounted microscope
SiOB
- Language
- ISSN
- 2167-0021
This paper reports an ultrasmall line scan nonlinear optical (ULSNLO) microscope with a twelve-fold reduction in overall volume compared with state-of-the-art designs, which benefits from the integration of, for the first time, a 1D dichroic MEMS (Microelectromechanical systems) scanner with a SiOB (Silicon optical bench) assembly. The ULSNLO microscope features its dimensions of ~7mm×6.5mm×3mm due to the novel dichroic scanning architecture and also highlights an ultrafast imaging speed up to thousands frames per second (fps) limited by the external CMOS camera. This design will enable the head-mounted fast functional neuronal soma imaging of freely behaving animals for neuroscience study.