Sensitivity Analysis of Micromachined Thermal Wind Sensor Based on Back Surface Sensing Mode
- Resource Type
- Conference
- Authors
- Wang, Zhenjun; Yi, Zhenxiang; Ye, Yizhou; Qin, Ming; Huang, Qing-An
- Source
- 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2018 IEEE 13th Annual International Conference on. :640-643 Apr, 2018
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Heating systems
Analytical models
Power measurement
Sensitivity analysis
Wind speed
Thermistors
Thermal sensors
sensitivity analysis
thermal flow sensor
back surface sensing
- Language
- ISSN
- 2474-3755
This paper presents the sensitivity analysis of the micromachined thermal wind sensor based on back surface sensing mode. The effects of heating power and distance $\pmb{L}$ on the sensitivity are analyzed via simulation and experiment. $\pmb{L}$ is the length between the heater and the thermistor. Experiment has been implemented by applying three different heating power values. On the ceramic substrate, eight thermistors are divided into two groups with different distance related to the heater. The results of simulation and experiment indicate that both the increase of heating power and the distance $\pmb{L}$ can improve the sensitivity of the sensor significantly. In the constant power mode, measuring range of wind speed from 0m/s to 33m/s and full range (360°) of wind direction detection have been achieved.