Compact RF MEMS Antenna with Silicon Substrate
- Resource Type
- Conference
- Authors
- Xiaoming, Zhu; Baisen, Liu; Xiaoguang, Wang
- Source
- 2018 IEEE 2nd International Conference on Circuits, System and Simulation (ICCSS) Circuits, System and Simulation (ICCSS), 2018 IEEE 2nd International Conference on. :101-104 Jul, 2018
- Subject
- Components, Circuits, Devices and Systems
Antennas
Micromechanical devices
Silicon
Substrates
Cavity resonators
Antenna measurements
Dielectric constant
RF MEMS
antenna
silicon
monopole
cavity
- Language
High dielectric constant silicon is used as substrate to design new style MEMS antenna in this paper. The design method of silicon antenna with back cavity is proposed. The back rectangular cavity is etched to form hybrid structure of silicon and air, which can lower effective dielectric constant and reduce surface wave loss of silicon substrate. The MEMS processing steps are designed to fabricate MEMS antenna with photoetching and ICP cavity etching process. The simulated and measured results show the compact MEMS antenna has ultra-wide frequency bandwidth and good omni-direction radiation performance.