Vibrating Dichroic MEMS Scanner Towards Ultrasmall Laser Scanning Microscopes
- Resource Type
- Conference
- Authors
- Xu, Yingshun; Cheng, Jin; Xu, Naitao
- Source
- 2018 International Conference on Optical MEMS and Nanophotonics (OMN) Optical MEMS and Nanophotonics (OMN), 2018 International Conference on. :1-5 Jul, 2018
- Subject
- Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
micromirror
optical coating
scanning optical microscope
endoscope
- Language
In this article authors present a conceptual design for ultrasmall laser scanning microscopes utilizing a vibrating dichroic MEMS scanner. In our design the reflective coating layer on the mirror plate of a MEMS scanner is replaced by a dichroic mirror plate. A commercial MEMS scanner is modified and characterized to prove our idea. An ultrathin dichroic mirror disk designed for two-photon fluorescence excitation is mounted on the circular mirror plate of a MEMS scanner. Resonant frequency shifts after additional disk mounting are also presented. By adopting our design, the structure of a scanning optical microscope could be significantly simplified.