Enhanced silicon single-photon avalanche diode based on light trapping
- Resource Type
- Conference
- Authors
- Zang, Kai; Jiang, Xiao; Huo, Yijie; Zheng, Tianzhe; Fei, Yueyang; Ding, Xun; Morea, Matthew; Xue, Muyu; Lu, Ching-Ying; Kamins, Theodore I.; Zhang, Qiang; Pan, Jian-Wei; Harris, James S.
- Source
- 2018 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2018 Conference on. :1-2 May, 2018
- Subject
- General Topics for Engineers
Photonics and Electrooptics
Silicon
Photonics
Light trapping
Jitter
Absorption
Surface waves
Image sensors
- Language
We present a nano-structured light-trapping Si SPAD with improved detection efficiency, without sacrificing jitter distribution or dark count rate. The design can be adopted for CMOS-compatible SPAD image sensors and silicon photomultipliers.