A sub-MW electromagnetic microspeaker with bass enhancement using a parylene/graphene/parylene composite membrane
- Resource Type
- Conference
- Authors
- Jadhav, P. R.; Cheng, Y. T.; Fan, S. K.; Liang, C. Y.
- Source
- 2018 IEEE Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2018 IEEE. :620-623 Jan, 2018
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Graphene
Electromagnetics
Fabrication
Hearing aids
Power demand
Micromechanical devices
Silicon
- Language
- ISSN
- 2160-1968
This paper demonstrates an ultra-low-power electromagnetic microspeaker where a parylene/ graphene/parylene composite layer is employed as the speaker membrane for not only bass sound enhancement but also for power improvement. The speaker with a ∼500 nm thin composite membrane in a size of 3.5 mm in diameter can exhibit a sound output of 104 dB sound pressure level (SPL) @ 670 Hz in a 2 c.c. coupler with an input power of 380 μW. This composite membrane speaker with the least power consumption performance has shown its great potential for the Completely-in-the-Canal (CIC) hearing aids applications with better battery life.