Impact of coupling between multiple SAW modes on piston mode operation of SAW resonators
- Resource Type
- Conference
- Authors
- Zhang, Benfeng; Han, Tao; Tang, Gongbin; Li, Xinyi; Huang, Yulin; Omori, Tatsuya; Hashimoto, Ken-ya
- Source
- 2017 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2017 IEEE International. :1-4 Sep, 2017
- Subject
- Bioengineering
Fields, Waves and Electromagnetics
Signal Processing and Analysis
transverse mode
piston mode operation
extended thin plate model
phase shifter
- Language
- ISSN
- 1948-5727
This paper investigates piston mode operation (PMO) when two kinds of surface acoustic wave (SAW) exist and are coupled to each other. The extended thin plate model is used for the analysis. Firstly, a PMO condition is derived in an analytical and closed form from the model. It is found that PMO is possible without adding phase shifters when two SAW modes are coupled. Then, parameters defined in the model are extracted for various SiO 2 -overlay/Al-gratmg/128°YX-LiNbO 3 (128-LN) substrate structures. It is shown that the PMO condition can be satisfied when the structure is properly designed. Finally, resonance characteristics of the designed structure are calculated by the extended thin plate model and 3D finite element method (FEM). The results of both methods agree with each other fairly well.