Surface textured silicon single-photon avalanche diode
- Resource Type
- Conference
- Authors
- Zang, Kai; Ding, Xun; Jiang, Xiao; Huo, Yijie; Morea, Matthew; Chen, Xiaochi; Lu, Ching-Ying; Xue, Muyu; Chen, Yusi; Shang, Colleen; Kamins, Theodore I.; Zhang, Qiang; Pan, Jian-Wei; Harris, James S.
- Source
- 2017 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2017 Conference on. :1-2 May, 2017
- Subject
- Fields, Waves and Electromagnetics
General Topics for Engineers
Photonics and Electrooptics
Surface texture
Silicon
Surface treatment
Jitter
Photonics
Light trapping
Absorption
- Language
We present a surface textured Si SPAD with improved detection efficiency and without sacrificing dark count rate or jitter distribution. Texturing reduces reflection, allows weak light trapping and is CMOS and lithography compatible.