Measurement of nanoscale grating structure by Mueller matrix ellipsometry
- Resource Type
- Conference
- Authors
- Shiqiu Cheng; Fengjiao Zhong; Huiping Chen; Yutao Jia; Shi, Yaoming; Xu, Yiping
- Source
- 2017 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2017 China. :1-3 Mar, 2017
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Optical variables measurement
Nanoscale devices
Physics
- Language
Spectroscopic ellipsometry technology has extensive applications in semiconductor metrology. Compared with spectroscopic ellipsometry, the Mueller matrix ellipsometry can acquire more useful information about the sample. In this paper, we present the construction of Mueller measurement equipment for 300 mm integrated circuit production line application and demonstrate the abilities of the equipment for accurate profile characterization of nanoscale structure. Mueller matrix ellipsometry may become a powerful technology for advanced technology node measurement in semiconductor device manufacturing applications.