Low-cost wearable cantilever-based nanoparticle sensor microsystem for personal health and safety monitoring
- Resource Type
- Conference
- Authors
- Wasisto, H.S.; Wu, W.; Merzsch, S.; Uhde, E.; Waag, A.; Peiner, E.
- Source
- 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on. :428-431 Jun, 2015
- Subject
- Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Transportation
Monitoring
Aerosols
Carbon
Detectors
Silicon
Atmospheric measurements
Size measurement
Carbon black
airborne nanoparticles
personal monitor
oscillating cantilever balance
real-time gravimetry
short-term exposure
- Language
- ISSN
- 2159-547X
2164-1641
A low-cost pocket-sized airborne nanoparticle (NP) detector based on a silicon microelectromechanical cantilever is described oscillating at its fundamental in-plane resonance frequency. For direct reading of NP concentrations, the monitoring system consists of signal-conditioning electronics for NP sampling as well as tracking of frequency shift by the attached NP mass. Weight and cost of this first fully integrated personal gravimetric airborne NP monitor (Cantor-2) are comparable to low-cost optical fine-particle sensors but beyond this it can detect ultra-fine particles (UFPs) of less than 100 nm in diameter. Real-time measurements with engineered carbon NPs as well as carbon black NPs exhibited a zero-offset linear correlation to reference measurements using a standard fast mobility particle sizer (FMPS). A limit of detection (LOD) of better than 10 µg/m 3 was found within a response time of 6 min, i.e., a typical short-term NP exposure duration.