15 mW of CW emission at 193 nm using the crystal KBBF
- Resource Type
- Conference
- Authors
- Scholz, Matthias; Opalevs, Dmitrijs; Stuhler, Jurgen; Leisching, Patrick; Kaenders, Wilhelm; Wang, Guiling; Wang, Xiaoyang; Li, Rukang; Chen, Chuangtian
- Source
- 2014 Conference on Lasers and Electro-Optics (CLEO) - Laser Science to Photonic Applications Lasers and Electro-Optics (CLEO), 2014 Conference on. :1-2 Jun, 2014
- Subject
- Photonics and Electrooptics
- Language
- ISSN
- 2160-8989
We report on a narrow-band continuous-wave laser source in the deep-ultraviolet with an output power of > 15 mW at 193 nm. We see applications of this laser source in semiconductor metrology and high-resolution spectroscopy.