The Development of an Ultra-precision Dual-stage Based on a Master-Slave Control System
- Resource Type
- Conference
- Authors
- Hou, Bo-jie; Gao, Jian-she; Zhou, Yun-fei
- Source
- 2012 International Conference on Computer Distributed Control and Intelligent Environmental Monitoring Computer Distributed Control and Intelligent Environmental Monitoring (CDCIEM), 2012 International Conference on. :727-730 Mar, 2012
- Subject
- Computing and Processing
Components, Circuits, Devices and Systems
Communication, Networking and Broadcast Technologies
Geoscience
Power, Energy and Industry Applications
Signal Processing and Analysis
Synchronous motors
Permanent magnet motors
Master-slave
Accuracy
Actuators
Couplings
Decouple
High speed/accuracy
Linear motor
Lorentz motor
Master-slave control
Ultra-precision dual-stage
- Language
A ultra-precision dual-stage based on a master-slave control mode is presented to meet the demand for nanometer level accuracy in this paper. The dual-stage is constructed with a linear motor and a Lorentz motor. By adopting the air bearing, both linear motor and Lorentz motor are regarded as a double differential system respectively. The coupling system of two stages has been decoupled. The "PID + feedforward" control structure is adopted. Nanometer level positioning accuracy and high moving speed are achieved. The experimental results are provided.