MEMS scanner enabled real-time depth sensitive hyperspectral imaging
- Resource Type
- Conference
- Authors
- Wang, Youmin; Bish, Sheldon; Gopal, Ashwini; Tunnell, James W; Zhang, Xiaojing
- Source
- 2010 International Conference on Optical MEMS and Nanophotonics Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on. :2-4 Aug, 2010
- Subject
- Photonics and Electrooptics
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Hyperspectral imaging
Imaging
Micromechanical devices
Image resolution
Micromirrors
Biology
Imaging phantoms
- Language
- ISSN
- 2160-5033
2160-5041
We demonstrate a hyperspectral and depth sensitive optical scattering diffusion imaging microsystem, where fast scanning is provided by a CMOS compatible 2-axis MEMS mirror. By using lissajous scanning patterns, large field-of-view (FOV) of 1.2cm × 1.2cm images with lateral resolution of 100µm can be taken at 1.3 frame-per-second (fps). Hyperspectral and depth-sensitive images were acquired on phantom samples consisting of quantum dots (QDs) patterned at various depths in PDMS, showing 6 nm spectral resolution and 0.43 wavelength per second acquisition speed. Images were also acquired on biological sample of porcine epitheliu m with QDs placed underneath the surface.