Three-dimensional microbatteries for MEMS/NEMS technology
- Resource Type
- Conference
- Authors
- Dunn, Bruce; Kim, Chang-Jin; Tolbert, Sarah
- Source
- 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on. :164-167 Jan, 2010
- Subject
- Components, Circuits, Devices and Systems
Power, Energy and Industry Applications
Bioengineering
Communication, Networking and Broadcast Technologies
Micromechanical devices
Nanoelectromechanical systems
Batteries
Electrodes
Anodes
Wireless sensor networks
Geometry
Conductivity
Cathodes
Phased arrays
- Language
- ISSN
- 1084-6999
We recently developed a new approach for battery design based on three-dimensional architectures which offer potential solutions for powering autonomous devices and maintaining small footprint areas. This paper provides a brief review of our work which applies micromachining methods to fabricate electrode arrays which serve as the central design element for these architectures. The results with the zinc-air primary batteries demonstrate that 3D configurations can achieve both high power and energy densities within a small footprint area. The development of lithium-ion batteries has not been as rapid although reversible electrochemical behavior has been demonstrated with 3D electrode array structures.