The PZT-substrate or PZT-electrode interface can affect the FE properties and specifically the fatigue behaviour. Typical Pt-PZT-Pt capacitors exhibited fatigue resistance up to 10/sup 8/-10/sup 9/ cycles, while RuO/sub 2/, La/sub 0.5/Sr/sub 0.5/CoO/sub 3/ and YBa/sub 2/Cu/sub 3/O/sub 7/ electrodes have been reported in literature to yield fatigue-free devices up to 10/sup 11/-10/sup 12/ cycles. In an early study which compared the fatigue behaviour of bulk PLZT ceramics with various metal electrodes, it was found that In offered the best fatigue performance (up to 10/sup 9/ cycles). A series of sol-gel derived PZT 53/47 films were fired to 700C to achieve single-phase FE perovskite films. Bottom electrode (or the substrate) consisted of sputtered Pt on oxidized Si wafers. Monolithic capacitors were obtained by depositing top electrodes of Ag, Au, Au-Pd, Pd and Pt. All the capacitors exhibited fatigue, manifested by lower values of P/sub r/, E/sub c/ and /spl epsi//sub r/ but higher leakage currents after cycling.