We report the influence of growth parameters and post-growth annealing on the structural characterizations and magnetic properties of (Ga, Cr)As films. The crystalline quality and magnetic properties are sensitive to the growth conditions. The single-phase (Ga, Cr)As film with the Curie temperature of 10 K is synthesized at growth temperature $T_{s}= 250\ ^{\circ}$C and with nominal Cr content $x = 0.016$ . However, for the films with $x > 0.02$, the aggregation of Cr atoms is strongly enhanced as both $T_{s}$ and $x$ increase, which not only brings strong compressive strain in the epilayer, but also roughens the surface. The origin of room-temperature ferromagnetism in (Ga, Cr)As films with nanoclusters is also discussed.