Technology and Properties of CrN Films Deposited by Multi-Arc Ion Plating
- Resource Type
- Conference
- Authors
- Yao, Xiaoming; Ling, Xiaoming; Jin, Qi; Fan, Duowang
- Source
- 2007 International Nano-Optoelectronics Workshop Nano-Optoelectronics Workshop, 2007. i-NOW '07. International. :298-299 Jul, 2007
- Subject
- Components, Circuits, Devices and Systems
Photonics and Electrooptics
Argon
Chromium
Voltage
Educational technology
Steel
Intelligent control
Tin
Building materials
Cleaning
Temperature
- Language
CrN films were deposited using Multi Arc Ion equipment on M35 steel. The experiment results indicate that the flow ratio of N2 to Ar play an important role in the properties of films.