Design of Micromachined RF Switch
- Resource Type
- Conference
- Authors
- Chen, Shuguang; Suzuki, Kenichiro; Marumoto, Tsunehisa; Ara, Youichi; Iwata, Ryuichi
- Source
- 1999 29th European Microwave Conference Microwave Conference, 1999. 29th European. 2:49-52 Oct, 1999
- Subject
- Fields, Waves and Electromagnetics
Radio frequency
Switches
Contacts
Microstrip
Electrodes
Glass
Substrates
Communication switching
Insertion loss
Insulation
- Language
The switch contact design of mechanical micromachined switches on the standpoint of the tradeoff between the return loss in the "On" state and the isolation in the "Off" state is discussed. The electrical characteristics of the switch fabricated on a glass substrate were measured from 1GHz to 30GHz. Insertion loss less than 0.3dB and return loss less than -15dB at 30GHz were obtained.