Actuator/Reflector Decoupling for Reduced Excitation of Secondary Mechanical Resonance Modes in MEMS-Tunable VCSELs
- Resource Type
- Conference
- Authors
- Menon, Vivek A.; Xiao, Yi; Khan, Mohammed S.; Isamoto, Keiji; Nishiyama, Nobuhiko; Toshiyoshi, Hiroshi
- Source
- 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :1075-1078 Jan, 2024
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Micromechanical devices
Suspensions (mechanical systems)
Resonant frequency
Stability analysis
Mirrors
Vertical cavity surface emitting lasers
Tuning
Vertical Cavity Surface Emitting Laser
Resonance
Interferometry
- Language
- ISSN
- 2160-1968
This report describes a suspension design for a tunable vertical cavity surface-emitting laser (VCSEL) electrostatic MEMS mirror that separates the reflector from the electrostatic actuator to reduce the influence of secondary mechanical resonance modes. Compared to a monolithic actuating membrane design, a hundredfold reduction in the mechanical displacement of the mirror in the secondary resonance mode relative to the fundamental mode has been achieved. This enhancement of the main mode over higher-order modes is expected to improve interferometric stability when higher-frequency feedback may otherwise cause undesired fluctuation, especially during low frequency operation.