Portable Single Thermocouple Biosensor Based on Dual Suspension Microfluidic Structure
- Resource Type
- Conference
- Authors
- Zhang, Hao; Huang, Jingkai; Xia, Yuanlin; Xia, Cao; Wang, Zhuqing
- Source
- 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :1166-1169 Jan, 2024
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Heating systems
Sensitivity
Thermocouples
Biosensors
Junctions
Microfluidics
Periodic structures
Thermocouple
Biosensor
Suspension structure
Seebeck effect
- Language
- ISSN
- 2160-1968
This paper reports a miniature biosensor combining a single thermocouple with a dual suspension microfluidic channel. The research enhances the sensitivity of the thermocouple junction by adopting silicon with high Seebeck coefficient as a highly sensitive material and preparing a microfluidic system on a suspended bridge structure. Meanwhile, A single thermocouple structure suitable for miniaturization is designed to realize the miniaturization of the biosensor. A sensitivity of 0.3942 V/W and a thermal response time of less than 200 ms were tested to be able to detect the heat of reaction of the enzyme. Thus, the sensor has high sensitivity and fast response properties along with advantages in simplicity and miniaturization, which is suitable for future applications in portable health medicine detection.