Manipulation of Zincum Oxide Nanowires for Bionanosensors Design
- Resource Type
- Conference
- Authors
- Prokunin, Aleksei; Koledov, Victor; Le, Ngo Thi Hong; Irzhak, Artem; Lega, Peter; Orlov, Andrey; Ky, Vu Hong; Bach, Ta Ngoc; Thu, PhungThi; Shavrov, Vladimir; Gratowski, Svetlana von; Maria, Evstafeva; Manh, Do Hung
- Source
- 2023 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2023 IEEE International Conference on. :63-66 Jul, 2023
- Subject
- Aerospace
Bioengineering
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
General Topics for Engineers
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Three-dimensional displays
II-VI semiconductor materials
Shape
Prototypes
Zinc oxide
Robot sensing systems
Nanoscale devices
ZnO nanowires
bionanosensors. hydrothermal method
gas sensors
shape memory effect
nanomanipulation
FIB
CVD
nanotweezers
- Language
- ISSN
- 2694-510X
The individual ZnO nanowires are recognized recently as promising highly sensitive media for the gas and bionanosensors in configuration of properly functionalized field-effect-transistor (NWFET). The aim of the present work is to create an experimental prototype of ZnO NWFET using mechanical bottom-up 3D nanomanipulation by shape memory nanotweezers thermally controlled in the vacuum chamber of SEM.The nanotweezers were used to create NWFETs as well as FIB-CVD. The ZnO nanowire width was from 15 to 300 nm. The length of ZnO nanowires was in the range of 1 to 50 μm.