Analysis of Thermal Infrared Detection via Silicon Nitride Trampoline Nanomechanical Resonator
- Resource Type
- Conference
- Authors
- Liu, Yuncong; Watkins, Connor A.; Feng, Philip X.-L.
- Source
- 2023 IEEE Research and Applications of Photonics in Defense Conference (RAPID) Photonics in Defense Conference (RAPID), 2023 IEEE Research and Applications of. :1-2 Sep, 2023
- Subject
- Photonics and Electrooptics
Silicon nitride
Metamaterials
Silicon
Thermal analysis
Resonators
Photonics
silicon nitride
thermal infrared (IR) detector
optomechanical resonator
trampoline resonator
noise
- Language
- ISSN
- 2836-6832
We present on a theoretical analysis of ultrasensitive infrared light detection by using silicon nitride (SiN) trampoline nanomechanical resonators. Among the engineering tradeoffs, using a low-stress film may enhance the resonator's response. Optimizing the absorptance with patterned metamaterials is expected to improve the resonance shift by three orders of magnitude.