In this work, magnetic anisotropy and magnetic damping factor (α s ) were studied at different temperatures (T) for the tungsten diselenide (WSe 2 )/Pt/CoFe heterostructure samples with various WSe 2 monolayer numbers (n ML ). We observed that the WSe 2 underlayer could weaken the perpendicular magnetic anisotropy due to the increased interfacial roughness and decreased orbital hybridization effect. In particular, the insertion of WSe 2 leads to a rather high α s , which mainly arises from the contributions of interfacial two-magnon scattering (TMS) and spin pumping by the WSe 2 layer. When T is gradually reduced below 200 K, the magnetic damping factor of WSe 2 /Pt/CoFe exhibits a much strong temperature dependence, as compared with the single CoFe films or Pt/CoFe bilayer. We consider the significant drop in damping at T