Miniature Mass Spectrometers for On-Site Chemical Analysis
- Resource Type
- Conference
- Authors
- Zhou, Xiaoyu; Li, Shuai; Ouyang, Zheng
- Source
- 2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC) Vacuum Nanoelectronics Conference (IVNC), 2023 IEEE 36th International. :157-159 Jul, 2023
- Subject
- Aerospace
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Nuclear Engineering
Photonics and Electrooptics
Instruments
Vacuum technology
Mass spectroscopy
Biology
Chemicals
Nanoelectronics
Miniature mass spectrometer
miniaturization technology
on-stie chemical analysis
- Language
- ISSN
- 2380-6311
The miniaturization of mass spectrometers is a fast- growing new direction for the mass spectrometry (MS), enabling the transition of MS from laboratory to point of sample collection and and from experts to novice end users. During the past two decades, some major efforts have been put into this field which led significant advancements in both instrumentation as well as application. Here, we review the recent development in MS miniaturization and highlight the state-of-the-art systems as well as new technologies allowing some new capabilities for chemical and biological analysis.