c-Axis parallel ZnO piezoelectric multilayer for BAW gyroscope applications
- Resource Type
- Conference
- Authors
- Hanai, Ayaka; Kudo, Shinya; Ekida, Kohei; Jia, Junjun; Yanagitani, Takahiko
- Source
- 2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2023 IEEE International Symposium on. :1-4 Mar, 2023
- Subject
- General Topics for Engineers
Radio frequency
Micromechanical devices
Magnetic films
Magnetic multilayers
II-VI semiconductor materials
Magnetoacoustic effects
Zinc oxide
MEMS gyroscope
c-axis parallel ZnO
ion beam assisted deposition
- Language
- ISSN
- 2377-3480
We presented a new type of gyroscope sensor using the transmission-and-detection type gyroscope sensor with the acoustic delay line. Detecting the pure shear wave can be achieved by using c-axis parallel ZnO films. c-Axis parallel ZnO films can be fabricated by using the ion beam assisted RF magnetron sputtering because c-axis in-plane detection of the top layer and bottom layer can be controlled to be vertical by the technique. In this paper, we propose that the piezoelectric thin films composed of c-axis parallel ZnO films show a shear mode electromechanical coupling coefficient $k_{15^{2}}$ of 2.0%, and especially, the pure shear wave excitation was observed in the gyroscope sensor.