Transverse Spurious Mode Free SAW Resonators and Delay Line on GaN/Si with High Quality Factor
- Resource Type
- Conference
- Authors
- Yu, Guofang; Liang, Renrong; Zhao, Haiming; Fu, Jun; Ren, Tian-Ling
- Source
- 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2023 7th IEEE. :1-3 Mar, 2023
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Q-factor
Electrodes
Surface acoustic waves
Piezoelectric transducers
Resonant frequency
Insertion loss
Delay lines
dummy finger
SAW
transverse spurious modes
high quality factor
- Language
This work presents a dummy finger structure for eliminating the transverse spurious mode on the GaN/Si surface acoustic wave (SAW) resonators. The fabricated resonators have a high quality factor, and the transverse spurious mode is effectively suppressed. A maximum quality factor of 81 77 at a resonant frequency $(f_{r})$ of 1.9173 GHz is obtained. Moreover, it is shown that the transverse spurious mode is independent of the propagation directions. A delay line with the dummy finger shows a minimum insertion loss of 16.44 dB. These results could pave the way for future intelligent lab-on-chip sensor applications.